2005 APS March Meeting
Monday–Friday, March 21–25, 2005;
Los Angeles, CA
Session Index
Session Y14: Focus Session: Supercritical Carbon Dioxide Processing
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Sponsoring Units: FIAP
Chair: Shubhra Gangopadhyay, U of Missouri
Room: LACC 403 B
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Friday, March 25, 2005
11:15AM - 11:51AM
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Y14.00001: Supercritical Fluid Technology for Interconnect Fabrication
Invited Speaker:
James Watkins
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Friday, March 25, 2005
11:51AM - 12:27PM
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Y14.00002: Development of Supercritical Processing in BEOL Cleans
Invited Speaker:
Richard Reidy
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Friday, March 25, 2005
12:27PM - 12:39PM
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Y14.00003: Supercritical Fluid Research Capabilities and Collaborations at Los Alamos National Laboratory
Kirk Hollis
, Jerry Barton
, Craig Taylor
, Laurie Williams
, Melvin Carter
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Friday, March 25, 2005
12:39PM - 12:51PM
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Y14.00004: SCORR - Supercritical Carbon Dioxide Resist Removal
Craig Taylor
, Jerry Barton
, Kirk Hollis
, Jim Rubin
, Laurie Williams
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Friday, March 25, 2005
12:51PM - 1:03PM
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Y14.00005: Supercritical CO2 for Resist Development: Towards an All-Dry Lithography Process
Nelson Felix
, Yu (Jessie) Mao
, Karen Gleason
, Christopher Ober
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Friday, March 25, 2005
1:03PM - 1:15PM
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Y14.00006: Effect of Ionic Conductivity of Elevated Pressure TMAHCO3 /MeOH/CO2 Mixtures on Cleaning Efficiency
Galit Levitin
, Dennis W. Hess
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Friday, March 25, 2005
1:15PM - 1:27PM
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Y14.00007: Atomic Layer Deposition of High-k Dielectrics Using Supercritical CO$_2$
Rajesh Shende
, Jorge Lubguban
, Maslina Othman
, Shubhra Gangopadhyay
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Friday, March 25, 2005
1:27PM - 1:39PM
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Y14.00008: Supercritical CO2/Co-solvents Extraction of Porogen and Surfactant to Obtain
Jorge Lubguban
, Arnold Lubguban
, Maslina Othman
, Rajesh Shende
, Shubhra Gangopadhyay
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