Bulletin of the American Physical Society
2005 APS March Meeting
Monday–Friday, March 21–25, 2005; Los Angeles, CA
Session W14: Focus Session: Electronic and Atomic Structures of Interfaces and Gate Stacks II
2:30 PM–5:42 PM,
Thursday, March 24, 2005
LACC
Room: 403B
Sponsoring
Unit:
FIAP
Chair: Gerd Duscher, NCSU
Abstract ID: BAPS.2005.MAR.W14.9
Abstract: W14.00009 : Nitrided hafnium silicates for gate dielectrics
5:18 PM–5:30 PM
Preview Abstract Abstract
Authors:
Chang-gong Wang
Mohith Verghese
Eric Shero
Glen Wilk
(ASM America, Inc.)
Jan Willem Maes
W. Deweerd
(IMEC)
R. Opila
(University of Delaware)
J. Morais
(Instituto de Fisica)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2005.MAR.W14.9
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