Bulletin of the American Physical Society
2005 APS March Meeting
Monday–Friday, March 21–25, 2005; Los Angeles, CA
Session W14: Focus Session: Electronic and Atomic Structures of Interfaces and Gate Stacks II
2:30 PM–5:42 PM,
Thursday, March 24, 2005
LACC
Room: 403B
Sponsoring
Unit:
FIAP
Chair: Gerd Duscher, NCSU
Abstract ID: BAPS.2005.MAR.W14.6
Abstract: W14.00006 : Electron Spin Resonance Observation of Si/Dielectric Interface Traps in Fully Processed Metal Gate Hafnium Oxide Field Effect Transistors
4:18 PM–4:30 PM
Preview Abstract Abstract
Authors:
Thomas Pribicko
Jason Campbell
Patrick Lenahan
(Pennsylvania State University)
Wilman Tsai
(Intel Corporation)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2005.MAR.W14.6
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