Bulletin of the American Physical Society
2005 APS March Meeting
Monday–Friday, March 21–25, 2005; Los Angeles, CA
Session A18: Focus Session: Semiconductor Characterization
8:00 AM–11:00 AM,
Monday, March 21, 2005
LACC
Room: 406A
Sponsoring
Units:
FIAP GIMS
Chair: David Seiler, NIST
Abstract ID: BAPS.2005.MAR.A18.6
Abstract: A18.00006 : High Resolution 2D Dopant Profiling of FinFET Structures using Scanning Probe Microscopy
9:24 AM–9:36 AM
Preview Abstract Abstract
Authors:
Alexander Khajetoorians
Jianlong Li
(Department of Physics, University of Texas at Austin)
Li Shi
(Department of Mechanical Engineering, University of Texas at Austin)
Xiang-Dong Wang
(Freescale Semiconductor)
Chih-Kang Shih
(Department of Physics, University of Texas at Austin)
Collaboration:
SEMATECH Inc.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2005.MAR.A18.6
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