Bulletin of the American Physical Society
2005 APS March Meeting
Monday–Friday, March 21–25, 2005; Los Angeles, CA
Session W5: Functional Ceramics: the Nano/Microstructure-Property Relationship in Electronic, Optical, Biological and Structural Materials
2:30 PM–5:30 PM,
Thursday, March 24, 2005
LACC
Room: 502B
Sponsoring
Unit:
FIAP
Chair: Robert Marzke, Arizona State University
Abstract ID: BAPS.2005.MAR.W5.3
Abstract: W5.00003 : Nanolayered EUV mirrors for the next generation lithography of integrated circuits*
3:42 PM–4:18 PM
Preview Abstract Abstract
Author:
Sasa Bajt
(Lawrence Livermore National Laboratory)
*This work was performed under the auspices of the U.S. Dept. of Energy by the University of California Lawrence Livermore National Laboratory under Contract No. W-7405-Eng-48.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2005.MAR.W5.3
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