Bulletin of the American Physical Society
73rd Annual Gaseous Electronics Virtual Conference
Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.
Session DM2: Workshop IV: Plasma Enhanced Atomic Layer Etch/Atomic Layer Deposition
12:45 PM–4:30 PM,
Monday, October 5, 2020
Chair: Sebastian Engelmann, IBM Research
Abstract: DM2.00004 : Reaction Network Analysis for Atomic Layer Deposition Processes*
2:30 PM–3:15 PM
Preview Abstract Abstract
*National Science Foundation
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