Tuesday, October 29, 2019
1:45PM - 2:00PM
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ET2.00001: The Influence of $\gamma$- and $\delta$-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas
Katharina Noesges, Aranka Derzsi, Benedek Horvath, Julian Schulze, Thomas Mussenbrock, Ralf Peter Brinkmann, Sebastian Wilczek
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Tuesday, October 29, 2019
2:00PM - 2:15PM
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ET2.00002: Surface processes in capacitive radio frequency discharges driven by tailored voltage waveforms
Aranka Derzsi, Julian Schulze
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Tuesday, October 29, 2019
2:15PM - 2:30PM
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ET2.00003: Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate
Ying-Ying Wen, Yu-Ru Zhang, Yuan-Hong Song, You-Nian Wang
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Tuesday, October 29, 2019
2:30PM - 2:45PM
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ET2.00004: Spatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2
Mate Vass, Sebastian Wilczek, Julian Schulze, Trevor Lafleur, Zoltan Donko, Ralf Peter Brinkmann
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Tuesday, October 29, 2019
2:45PM - 3:00PM
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ET2.00005: Effect of driving frequency on electron heating mechanism and plasma parameters in a symmetric capacitive discharge under constant power density condition
Nishant Sirse, Sarveshwar Sharma, Miles Turner
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Tuesday, October 29, 2019
3:00PM - 3:15PM
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ET2.00006: Student Excellence Award Finalist: A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal
Florian Krüger, Sebastian Wilczek, Thomas Mussenbock, Julian Schulze
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Tuesday, October 29, 2019
3:15PM - 3:30PM
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ET2.00007: Electric field reversal and electron heating mode transition induced by magnetic field in capacitive oxygen discharges
Li Wang, De-Qi Wen, Yuan-Hong Song, You-Nian Wang
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Tuesday, October 29, 2019
3:30PM - 3:45PM
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ET2.00008: Electron heating in magnetized capacitively coupled discharges
Bocong Zheng, Thomas Schuelke, Qi Hua Fan
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