Bulletin of the American Physical Society
71st Annual Gaseous Electronics Conference
Volume 63, Number 10
Monday–Friday, November 5–9, 2018; Portland, Oregon
Session GT1: Poster Session I
3:30 PM,
Tuesday, November 6, 2018
Oregon Convention Center
Room: Exhibit Hall A1
Abstract ID: BAPS.2018.GEC.GT1.44
Abstract: GT1.00044 : Control of the mechanical stress of AlN coatings using the electrical asymmetry effect in a large-area multi- frequency CCP*
Preview Abstract Abstract
Authors:
Stefan Ries
(Ruhr Univ Bochum)
Lars Banko
(Ruhr Univ Bochum)
Julian Schulze
(Ruhr Univ Bochum)
Alfred Ludwig
(Ruhr Univ Bochum)
Peter Awakowicz
(Ruhr Univ Bochum)
Collaborations:
Institute of Materials, Materials for Microtechnology, Institute of Electrical Engineering and Plasma Technology
*We want to thank the German Research foundation for funding our sub-project within the SFB-TR 87
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.GEC.GT1.44
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