Bulletin of the American Physical Society
71st Annual Gaseous Electronics Conference
Volume 63, Number 10
Monday–Friday, November 5–9, 2018; Portland, Oregon
Session GT1: Poster Session I
3:30 PM,
Tuesday, November 6, 2018
Oregon Convention Center
Room: Exhibit Hall A1
Abstract ID: BAPS.2018.GEC.GT1.40
Abstract: GT1.00040 : Evaluation of gas phase and wall surface chemical reactions in CF$_{\mathrm{4}}$ and C$_{\mathrm{4}}$F$_{\mathrm{8}}$ plasmas*
Preview Abstract Abstract
Authors:
Xi-Feng Wang
(Dalian University of Technology,China; Princeton Plasma Phys Lab, US)
Yuan-Hong Song
(Dalian University of Technology, China)
You-Nian Wang
(Dalian University of Technology, China)
Igor Kaganovich
(Princeton Plasma Phys Lab, US)
*This work is supported by National Natural Science Foundation of China (Grant No. 11675036 and 11275038);U.S. Department of Energy;
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.GEC.GT1.40
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