Bulletin of the American Physical Society
71st Annual Gaseous Electronics Conference
Volume 63, Number 10
Monday–Friday, November 5–9, 2018; Portland, Oregon
Session GT1: Poster Session I
3:30 PM,
Tuesday, November 6, 2018
Oregon Convention Center
Room: Exhibit Hall A1
Abstract ID: BAPS.2018.GEC.GT1.103
Abstract: GT1.00103 : Experimental investigation of the generation of multiple electron beams during the sheath expansion phase in capacitive RF plasmas
Preview Abstract Abstract
Authors:
Birk Berger
(BTU Cottbus-Senftenberg, Germany; Ruhr-University Bochum, Germany)
Kwang-Ho You
(Semiconductor R&D Center, Samsung Electronics Co., Ltd., Republic of Korea)
Hyo-Chang Lee
(Korea Research Institute of Standards and Science, Republic of Korea)
Thomas Mussenbrock
(BTU Cottbus-Senftenberg, Germany)
Peter Awakowicz
(Ruhr-University Bochum, Germany)
Julian Schulze
(Ruhr-University Bochum, Germany)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.GEC.GT1.103
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