Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session TR2: Magnetrons II
4:00 PM–5:15 PM,
Thursday, October 13, 2016
Room: 2a
Chair: Jon Gudmundsson, University of Iceland
Abstract ID: BAPS.2016.GEC.TR2.4
Abstract: TR2.00004 : Modeling of RF Magnetron Plasma in N$_{\mathrm{2}}$ with dielectric target
4:45 PM–5:00 PM
Preview Abstract Abstract
Authors:
Steven Arbeltier
(LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France / CEA, LETI, Minatec Campus, 17 rue des Martyrs, Grenoble, France)
Adrien Revel
(LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France)
Frédéric Sabary
(CEA, Le Ripault, France)
Christophe Secouard
(CEA, LETI, Minatec Campus, 17 rue des Martyrs, Grenoble, France)
Tiberiu Minea
(LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.TR2.4
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