Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session SR2: Inductively Coupled Plasmas II
2:00 PM–3:30 PM,
Thursday, October 13, 2016
Room: 2a
Chair: Jean Paul Booth, Ecole Polytechnique
Abstract ID: BAPS.2016.GEC.SR2.5
Abstract: SR2.00005 : Research on the mechanism of multiple inductively coupled plasma source for large area processing
3:00 PM–3:15 PM
Preview Abstract Abstract
Authors:
JangJae Lee
(Department of physics, Chungnam National University)
SiJun Kim
(Department of physics, Chungnam National University)
DaeWoong Kim
(Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
KwangKi Kim
(Department of physics, Chungnam National University)
YoungSeok Lee
(Department of physics, Chungnam National University)
ShinJae You
(Department of physics, Chungnam National University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.SR2.5
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