Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session DT1: Electrical Diagnostics I
8:30 AM–10:30 AM,
Tuesday, October 11, 2016
Room: 1
Chair: Yevgeny Raitses, Princeton Plasma Physics Laboratory
Abstract ID: BAPS.2016.GEC.DT1.6
Abstract: DT1.00006 : Combined complementary plasma diagnostics to characterize a 2f plasma with additional DC current with conditioning effects at the chamber wall
10:00 AM–10:15 AM
Preview Abstract Abstract
Authors:
Michael Klick
(Plasmetrex GmbH)
Ralf Rothe
(Plasmetrex GmbH)
Kye Hyun Baek
(Semiconductor R&D Center, Samsung Electronics Co.)
Eunwoo Lee
(Semiconductor R&D Center, Samsung Electronics Co.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.DT1.6
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