Bulletin of the American Physical Society

68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing

Volume 60, Number 9

Monday–Friday, October 12–16, 2015; Honolulu, Hawaii

Session Index

Session TF1: Plasma Interaction with Liquids III

Chair: David Go, University of Notre Dame
Room: 301 B

Friday, October 16, 2015 10:00AM - 10:15AM		TF1.00001: Measurement of OH Radical in an Atmospheric Plasma Generated on Water Surface Brandon Byrns , Alex Lindsay , Kris Ford , Steve Shanno , Detlef Knappe Preview Abstract
Friday, October 16, 2015 10:15AM - 10:30AM		TF1.00002: Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation Giichiro Uchida , Atsushi Nakajima , Toshiyuki Kawasaki , Kazunori Koga , Kosuke Takenaka , Masaharu Shiratani , Yuichi Setsuhara Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF1.00003: Generation Mechanisms of Hydroxyl Radical and Hydrogen Peroxide in Plasma Generated over Solution Nozomi Takeuchi , Naoto Ishibashi , Daichi Shiraki Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF1.00004: In-water plasma generation and its performance using a coaxial DBD device and compact power supply Shin-ichi Imai , Y. Sakaguchi , Y. Miyamoto , A. Odagwa , Tatsuru Shirafuji Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF1.00005: Decomposition of n-Dodecane for Hydrogen Production using Microwave in-Liquid Plasma Method Andi Amijoyo Mochtar , Shinfuku Nomura , Shinobu Mukasa , Hiromichi Toyota , Kohji Kawamukai Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF1.00006: One Step Phenol Production from Toluene Solution Using RF In-Liquid Plasma Muhammad Agung , Shinfuku Nomura , Shinobu Mukasa , Hiromichi Toyota , Hidekazu Goto , Otsuka Kazuhiko Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF1.00007: Generation of Discharge Plasma in Gas-Liquid Slug Flow Kakeru Mano , Yui Hayashi , Noriharu Takada , Hideki Kanda , Motonobu Goto Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF1.00008: Application of strong pulse electric fields for disinfecting of the water mediums Elchin Gurbanov , Arif Hashimov Preview Abstract

Session TF2: Plasma Etching II

Chair: Demetre Economou, University of Houston
Room: 308 AB

Friday, October 16, 2015 10:00AM - 10:30AM		TF2.00001: Cryogenic Etching for Sub-10 nm Patterning for Bit Patterned Media Fabrication Invited Speaker: Deirdre Olynick Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF2.00002: Atomic Layer Etch to Escape Aspect Ratio Dependent Etching-Profile-Selectivity Trade-offs in Plasma Etch Alok Ranjan , Mingmei Wang , Sonam Sherpa , Peter Ventzek Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF2.00003: Low Damage Etching with Atomic Layer Precision L. Dorf , S. Rauf , G. Monroy , K. Ramaswamy , K. Collins , Y. Zhang Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF2.00004: Layer by layer etching of LaAlSiOx Mitsuhiro Omura , Kazuhito Furumoto , Kazuhisa Matsuda , Toshiyuki Sasaki , Itsuko Sakai , Hisataka Hayashi Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF2.00005: Cryogenic etching of Si with SF$_{6}$/O$_{2}$: a modeling and experimental study Stefan Tinck , Erik C. Neyts , Thomas Tillocher , Remi Dussart , Annemie Bogaerts Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF2.00006: Etching of GaAs materials by chlorine neutral beam for quantum nanodisks fabrication Cedric Thomas , Akio Higo , Takeru Okada , Seiji Samukawa Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF2.00007: Etching of Magnetic Tunneling Junctions Materials using a Reactive Ion Beam Kyung Chae Yang , Sung Woo Park , Min Hwan Jeon , Geun Young Yeom Preview Abstract
Friday, October 16, 2015 12:00PM - 12:15PM		TF2.00008: Dry Etching of Si$_{3}$N$_{4}$, SiO$_{2}$ and Si Using Remote Plasma Sources Sustained in NF$_{3}$ Mixtures Shuo Huang , Vladimir Volynets , Sangheon Lee , In-Cheol Song , Siqing Lu , James Hamilton , Jonathan Tennyson , Mark J. Kushner Preview Abstract

Session TF3: Applications of Plasmas

Chair: Hirotaka Toyoda, Nagoya University
Room: 305 AB

Friday, October 16, 2015 10:00AM - 10:30AM		TF3.00001: Plasmas and Nanostructures for Energy Applications Invited Speaker: Sylvain Coulombe Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF3.00002: Carbon nanoparticles in the radiation field of the stationary arc discharge Mikhail Shneider Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF3.00003: The structure of carbon needle-shaped materials grown above dehydrated ethanol using DC and AC surface plasma Dmytro Kozak , Etsuro Shibata , Atsushi Iizuka , Takashi Nakamura Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF3.00004: Development and investigation of a pulsed screw pinch for the application as a FAIR plasma stripper Marcus Iberler , Thilo Ackermann , Benjamin Bruenner , Fiona Faber , Christian Hock , Joerg Wiechula , Joachim Jacoby Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF3.00005: Loop-shaped UV lamp array with uniform irradiation distribution driven by a poly-phase ac discharge/plasma in a multi-pole magnetic field Kazunori Matsumoto Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF3.00006: A coherent x-ray source from plasma using high-order harmonic generation Dane Laban , Smijesh Achary , Nicolai Klemke , James Wood , Dashavir Chetty , David Kielpinski , Igor Litvinyuk , Robert Sang Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF3.00007: Evaluation of iodine as an alternative propellant for gridded electric space propulsion systems Pascaline Grondein , Trevor Lafleur , Pascal Chabert , Ane Aanesland Preview Abstract

Session TF4: Atmospheric Pressure Plasma Jets

Chair: Mikhail Benilov, University of Madeira
Room: 303 AB

Friday, October 16, 2015 10:00AM - 10:30AM		TF4.00001: Computational Modeling and Simulation of Micron-Scale Discharges and Their Interactions with High-Frequency Electromagnetic Waves Invited Speaker: Laxminarayan L. Raja Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF4.00002: Temporal evolution of the EVDF in a ns-pulsed APPJ in Helium Uwe Czarnetzki , Christian Schregel , Dirk Luggenh\"olscher Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF4.00003: Influence of HV pulse repetition rate on densities of excited species in atmospheric helium plasma jet Nader Sadeghi , Vincent Puech , Claire Douat Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF4.00004: Comparison between micro hollow cathode discharges and atmospheric pressure plasma jets working in Ar/O$_{2}$ Claudia Lazzaroni , Pascal Chabert Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF4.00005: Gas and heat dynamics of a micro-scaled atmospheric pressure plasma jet Judith Golda , Sean Kelly , Miles M. Turner , Volker Schulz-von der Gathen Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF4.00006: Properties of DC-Pulsed Microplasma Arrays at Intermediate Pressures Peng Tian , Chenhui Qu , Mark J. Kushner Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF4.00007: Phase-resolved imaging of the interaction dynamics in rf-driven microplasma arrays at atmospheric pressure Jerome Bredin , Katharina Grosse , Sameer Al-Bataineh , Endre Szili , Rob Short , Deborah O'Connell Preview Abstract

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