Bulletin of the American Physical Society

68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing

Volume 60, Number 9

Monday–Friday, October 12–16, 2015; Honolulu, Hawaii

Session Index

Session TF1: Plasma Interaction with Liquids III

Chair: David Go, University of Notre Dame
Room: 301 B

Friday, October 16, 2015 10:00AM - 10:15AM		TF1.00001: Measurement of OH Radical in an Atmospheric Plasma Generated on Water Surface Brandon Byrns, Alex Lindsay, Kris Ford, Steve Shanno, Detlef Knappe Preview Abstract
Friday, October 16, 2015 10:15AM - 10:30AM		TF1.00002: Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation Giichiro Uchida, Atsushi Nakajima, Toshiyuki Kawasaki, Kazunori Koga, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF1.00003: Generation Mechanisms of Hydroxyl Radical and Hydrogen Peroxide in Plasma Generated over Solution Nozomi Takeuchi, Naoto Ishibashi, Daichi Shiraki Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF1.00004: In-water plasma generation and its performance using a coaxial DBD device and compact power supply Shin-ichi Imai, Y. Sakaguchi, Y. Miyamoto, A. Odagwa, Tatsuru Shirafuji Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF1.00005: Decomposition of n-Dodecane for Hydrogen Production using Microwave in-Liquid Plasma Method Andi Amijoyo Mochtar, Shinfuku Nomura, Shinobu Mukasa, Hiromichi Toyota, Kohji Kawamukai Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF1.00006: One Step Phenol Production from Toluene Solution Using RF In-Liquid Plasma Muhammad Agung, Shinfuku Nomura, Shinobu Mukasa, Hiromichi Toyota, Hidekazu Goto, Otsuka Kazuhiko Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF1.00007: Generation of Discharge Plasma in Gas-Liquid Slug Flow Kakeru Mano, Yui Hayashi, Noriharu Takada, Hideki Kanda, Motonobu Goto Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF1.00008: Application of strong pulse electric fields for disinfecting of the water mediums Elchin Gurbanov, Arif Hashimov Preview Abstract

Session TF2: Plasma Etching II

Chair: Demetre Economou, University of Houston
Room: 308 AB

Friday, October 16, 2015 10:00AM - 10:30AM		TF2.00001: Cryogenic Etching for Sub-10 nm Patterning for Bit Patterned Media Fabrication Invited Speaker: Deirdre Olynick Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF2.00002: Atomic Layer Etch to Escape Aspect Ratio Dependent Etching-Profile-Selectivity Trade-offs in Plasma Etch Alok Ranjan, Mingmei Wang, Sonam Sherpa, Peter Ventzek Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF2.00003: Low Damage Etching with Atomic Layer Precision L. Dorf, S. Rauf, G. Monroy, K. Ramaswamy, K. Collins, Y. Zhang Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF2.00004: Layer by layer etching of LaAlSiOx Mitsuhiro Omura, Kazuhito Furumoto, Kazuhisa Matsuda, Toshiyuki Sasaki, Itsuko Sakai, Hisataka Hayashi Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF2.00005: Cryogenic etching of Si with SF$_{6}$/O$_{2}$: a modeling and experimental study Stefan Tinck, Erik C. Neyts, Thomas Tillocher, Remi Dussart, Annemie Bogaerts Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF2.00006: Etching of GaAs materials by chlorine neutral beam for quantum nanodisks fabrication Cedric Thomas, Akio Higo, Takeru Okada, Seiji Samukawa Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF2.00007: Etching of Magnetic Tunneling Junctions Materials using a Reactive Ion Beam Kyung Chae Yang, Sung Woo Park, Min Hwan Jeon, Geun Young Yeom Preview Abstract
Friday, October 16, 2015 12:00PM - 12:15PM		TF2.00008: Dry Etching of Si$_{3}$N$_{4}$, SiO$_{2}$ and Si Using Remote Plasma Sources Sustained in NF$_{3}$ Mixtures Shuo Huang, Vladimir Volynets, Sangheon Lee, In-Cheol Song, Siqing Lu, James Hamilton, Jonathan Tennyson, Mark J. Kushner Preview Abstract

Session TF3: Applications of Plasmas

Chair: Hirotaka Toyoda, Nagoya University
Room: 305 AB

Friday, October 16, 2015 10:00AM - 10:30AM		TF3.00001: Plasmas and Nanostructures for Energy Applications Invited Speaker: Sylvain Coulombe Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF3.00002: Carbon nanoparticles in the radiation field of the stationary arc discharge Mikhail Shneider Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF3.00003: The structure of carbon needle-shaped materials grown above dehydrated ethanol using DC and AC surface plasma Dmytro Kozak, Etsuro Shibata, Atsushi Iizuka, Takashi Nakamura Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF3.00004: Development and investigation of a pulsed screw pinch for the application as a FAIR plasma stripper Marcus Iberler, Thilo Ackermann, Benjamin Bruenner, Fiona Faber, Christian Hock, Joerg Wiechula, Joachim Jacoby Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF3.00005: Loop-shaped UV lamp array with uniform irradiation distribution driven by a poly-phase ac discharge/plasma in a multi-pole magnetic field Kazunori Matsumoto Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF3.00006: A coherent x-ray source from plasma using high-order harmonic generation Dane Laban, Smijesh Achary, Nicolai Klemke, James Wood, Dashavir Chetty, David Kielpinski, Igor Litvinyuk, Robert Sang Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF3.00007: Evaluation of iodine as an alternative propellant for gridded electric space propulsion systems Pascaline Grondein, Trevor Lafleur, Pascal Chabert, Ane Aanesland Preview Abstract

Session TF4: Atmospheric Pressure Plasma Jets

Chair: Mikhail Benilov, University of Madeira
Room: 303 AB

Friday, October 16, 2015 10:00AM - 10:30AM		TF4.00001: Computational Modeling and Simulation of Micron-Scale Discharges and Their Interactions with High-Frequency Electromagnetic Waves Invited Speaker: Laxminarayan L. Raja Preview Abstract
Friday, October 16, 2015 10:30AM - 10:45AM		TF4.00002: Temporal evolution of the EVDF in a ns-pulsed APPJ in Helium Uwe Czarnetzki, Christian Schregel, Dirk Luggenh\"olscher Preview Abstract
Friday, October 16, 2015 10:45AM - 11:00AM		TF4.00003: Influence of HV pulse repetition rate on densities of excited species in atmospheric helium plasma jet Nader Sadeghi, Vincent Puech, Claire Douat Preview Abstract
Friday, October 16, 2015 11:00AM - 11:15AM		TF4.00004: Comparison between micro hollow cathode discharges and atmospheric pressure plasma jets working in Ar/O$_{2}$ Claudia Lazzaroni, Pascal Chabert Preview Abstract
Friday, October 16, 2015 11:15AM - 11:30AM		TF4.00005: Gas and heat dynamics of a micro-scaled atmospheric pressure plasma jet Judith Golda, Sean Kelly, Miles M. Turner, Volker Schulz-von der Gathen Preview Abstract
Friday, October 16, 2015 11:30AM - 11:45AM		TF4.00006: Properties of DC-Pulsed Microplasma Arrays at Intermediate Pressures Peng Tian, Chenhui Qu, Mark J. Kushner Preview Abstract
Friday, October 16, 2015 11:45AM - 12:00PM		TF4.00007: Phase-resolved imaging of the interaction dynamics in rf-driven microplasma arrays at atmospheric pressure Jerome Bredin, Katharina Grosse, Sameer Al-Bataineh, Endre Szili, Rob Short, Deborah O'Connell Preview Abstract

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