Friday, October 16, 2015
10:00AM - 10:15AM
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TF1.00001: Measurement of OH Radical in an Atmospheric Plasma Generated on Water Surface
Brandon Byrns
, Alex Lindsay
, Kris Ford
, Steve Shanno
, Detlef Knappe
Preview Abstract |
Friday, October 16, 2015
10:15AM - 10:30AM
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TF1.00002: Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation
Giichiro Uchida
, Atsushi Nakajima
, Toshiyuki Kawasaki
, Kazunori Koga
, Kosuke Takenaka
, Masaharu Shiratani
, Yuichi Setsuhara
Preview Abstract |
Friday, October 16, 2015
10:30AM - 10:45AM
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TF1.00003: Generation Mechanisms of Hydroxyl Radical and Hydrogen Peroxide in Plasma Generated over Solution
Nozomi Takeuchi
, Naoto Ishibashi
, Daichi Shiraki
Preview Abstract |
Friday, October 16, 2015
10:45AM - 11:00AM
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TF1.00004: In-water plasma generation and its performance using a coaxial DBD device and compact power supply
Shin-ichi Imai
, Y. Sakaguchi
, Y. Miyamoto
, A. Odagwa
, Tatsuru Shirafuji
Preview Abstract |
Friday, October 16, 2015
11:00AM - 11:15AM
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TF1.00005: Decomposition of n-Dodecane for Hydrogen Production using Microwave in-Liquid Plasma Method
Andi Amijoyo Mochtar
, Shinfuku Nomura
, Shinobu Mukasa
, Hiromichi Toyota
, Kohji Kawamukai
Preview Abstract |
Friday, October 16, 2015
11:15AM - 11:30AM
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TF1.00006: One Step Phenol Production from Toluene Solution Using RF In-Liquid Plasma
Muhammad Agung
, Shinfuku Nomura
, Shinobu Mukasa
, Hiromichi Toyota
, Hidekazu Goto
, Otsuka Kazuhiko
Preview Abstract |
Friday, October 16, 2015
11:30AM - 11:45AM
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TF1.00007: Generation of Discharge Plasma in Gas-Liquid Slug Flow
Kakeru Mano
, Yui Hayashi
, Noriharu Takada
, Hideki Kanda
, Motonobu Goto
Preview Abstract |
Friday, October 16, 2015
11:45AM - 12:00PM
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TF1.00008: Application of strong pulse electric fields for disinfecting of the water mediums
Elchin Gurbanov
, Arif Hashimov
Preview Abstract |
Friday, October 16, 2015
10:00AM - 10:30AM
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TF2.00001: Cryogenic Etching for Sub-10 nm Patterning for Bit Patterned Media Fabrication
Invited Speaker:
Deirdre Olynick
Preview Abstract |
Friday, October 16, 2015
10:30AM - 10:45AM
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TF2.00002: Atomic Layer Etch to Escape Aspect Ratio Dependent Etching-Profile-Selectivity Trade-offs in Plasma Etch
Alok Ranjan
, Mingmei Wang
, Sonam Sherpa
, Peter Ventzek
Preview Abstract |
Friday, October 16, 2015
10:45AM - 11:00AM
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TF2.00003: Low Damage Etching with Atomic Layer Precision
L. Dorf
, S. Rauf
, G. Monroy
, K. Ramaswamy
, K. Collins
, Y. Zhang
Preview Abstract |
Friday, October 16, 2015
11:00AM - 11:15AM
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TF2.00004: Layer by layer etching of LaAlSiOx
Mitsuhiro Omura
, Kazuhito Furumoto
, Kazuhisa Matsuda
, Toshiyuki Sasaki
, Itsuko Sakai
, Hisataka Hayashi
Preview Abstract |
Friday, October 16, 2015
11:15AM - 11:30AM
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TF2.00005: Cryogenic etching of Si with SF$_{6}$/O$_{2}$: a modeling and experimental study
Stefan Tinck
, Erik C. Neyts
, Thomas Tillocher
, Remi Dussart
, Annemie Bogaerts
Preview Abstract |
Friday, October 16, 2015
11:30AM - 11:45AM
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TF2.00006: Etching of GaAs materials by chlorine neutral beam for quantum nanodisks fabrication
Cedric Thomas
, Akio Higo
, Takeru Okada
, Seiji Samukawa
Preview Abstract |
Friday, October 16, 2015
11:45AM - 12:00PM
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TF2.00007: Etching of Magnetic Tunneling Junctions Materials using a Reactive Ion Beam
Kyung Chae Yang
, Sung Woo Park
, Min Hwan Jeon
, Geun Young Yeom
Preview Abstract |
Friday, October 16, 2015
12:00PM - 12:15PM
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TF2.00008: Dry Etching of Si$_{3}$N$_{4}$, SiO$_{2}$ and Si Using Remote Plasma Sources Sustained in NF$_{3}$ Mixtures
Shuo Huang
, Vladimir Volynets
, Sangheon Lee
, In-Cheol Song
, Siqing Lu
, James Hamilton
, Jonathan Tennyson
, Mark J. Kushner
Preview Abstract |
Friday, October 16, 2015
10:00AM - 10:30AM
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TF3.00001: Plasmas and Nanostructures for Energy Applications
Invited Speaker:
Sylvain Coulombe
Preview Abstract |
Friday, October 16, 2015
10:30AM - 10:45AM
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TF3.00002: Carbon nanoparticles in the radiation field of the stationary arc discharge
Mikhail Shneider
Preview Abstract |
Friday, October 16, 2015
10:45AM - 11:00AM
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TF3.00003: The structure of carbon needle-shaped materials grown above dehydrated ethanol using DC and AC surface plasma
Dmytro Kozak
, Etsuro Shibata
, Atsushi Iizuka
, Takashi Nakamura
Preview Abstract |
Friday, October 16, 2015
11:00AM - 11:15AM
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TF3.00004: Development and investigation of a pulsed screw pinch for the application as a FAIR plasma stripper
Marcus Iberler
, Thilo Ackermann
, Benjamin Bruenner
, Fiona Faber
, Christian Hock
, Joerg Wiechula
, Joachim Jacoby
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Friday, October 16, 2015
11:15AM - 11:30AM
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TF3.00005: Loop-shaped UV lamp array with uniform irradiation distribution driven by a poly-phase ac discharge/plasma in a multi-pole magnetic field
Kazunori Matsumoto
Preview Abstract |
Friday, October 16, 2015
11:30AM - 11:45AM
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TF3.00006: A coherent x-ray source from plasma using high-order harmonic generation
Dane Laban
, Smijesh Achary
, Nicolai Klemke
, James Wood
, Dashavir Chetty
, David Kielpinski
, Igor Litvinyuk
, Robert Sang
Preview Abstract |
Friday, October 16, 2015
11:45AM - 12:00PM
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TF3.00007: Evaluation of iodine as an alternative propellant for gridded electric space propulsion systems
Pascaline Grondein
, Trevor Lafleur
, Pascal Chabert
, Ane Aanesland
Preview Abstract |
Friday, October 16, 2015
10:00AM - 10:30AM
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TF4.00001: Computational Modeling and Simulation of Micron-Scale Discharges and Their Interactions with High-Frequency Electromagnetic Waves
Invited Speaker:
Laxminarayan L. Raja
Preview Abstract |
Friday, October 16, 2015
10:30AM - 10:45AM
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TF4.00002: Temporal evolution of the EVDF in a ns-pulsed APPJ in Helium
Uwe Czarnetzki
, Christian Schregel
, Dirk Luggenh\"olscher
Preview Abstract |
Friday, October 16, 2015
10:45AM - 11:00AM
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TF4.00003: Influence of HV pulse repetition rate on densities of excited species in atmospheric helium plasma jet
Nader Sadeghi
, Vincent Puech
, Claire Douat
Preview Abstract |
Friday, October 16, 2015
11:00AM - 11:15AM
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TF4.00004: Comparison between micro hollow cathode discharges and atmospheric pressure plasma jets working in Ar/O$_{2}$
Claudia Lazzaroni
, Pascal Chabert
Preview Abstract |
Friday, October 16, 2015
11:15AM - 11:30AM
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TF4.00005: Gas and heat dynamics of a micro-scaled atmospheric pressure plasma jet
Judith Golda
, Sean Kelly
, Miles M. Turner
, Volker Schulz-von der Gathen
Preview Abstract |
Friday, October 16, 2015
11:30AM - 11:45AM
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TF4.00006: Properties of DC-Pulsed Microplasma Arrays at Intermediate Pressures
Peng Tian
, Chenhui Qu
, Mark J. Kushner
Preview Abstract |
Friday, October 16, 2015
11:45AM - 12:00PM
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TF4.00007: Phase-resolved imaging of the interaction dynamics in rf-driven microplasma arrays at atmospheric pressure
Jerome Bredin
, Katharina Grosse
, Sameer Al-Bataineh
, Endre Szili
, Rob Short
, Deborah O'Connell
Preview Abstract |