Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session NR2: Plasma CVD/Radical Assisted CVD
8:00 AM–9:30 AM,
Thursday, October 15, 2015
Room: 308 AB
Chair: Kazunori Koga, Kyushu University
Abstract ID: BAPS.2015.GEC.NR2.1
Abstract: NR2.00001 : Spectroscopic studies of MW plasmas containing HMDSO, O$_{2}$ and N$_{2}$*
8:00 AM–8:15 AM
Preview Abstract Abstract
Authors:
Andy Nave
(INP-Greifswald, Germany)
Juergen Roepcke
(INP-Greifswald, Germany)
Felix Mitschker
(Ruhr University Bochum, Germany)
Peter Awakowicz
(Ruhr University Bochum, Germany)
*Supported by the German Research Foundation within SFB-TR24 and SFB-TR87.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.NR2.1
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