Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session LW1: Poster Session II (4:00pm - 6:00pm)
4:00 PM,
Wednesday, October 14, 2015
Room: Exhibit Hall III
Abstract ID: BAPS.2015.GEC.LW1.172
Abstract: LW1.00172 : Plasma Properties of Superimposed Dual Frequency Inductively Coupled Plasma Source
Preview Abstract Abstract
Authors:
Tae Hyung Kim
(Sungkyunkwan University)
Seung Min Lee
(Sungkyunkwan University)
Chul Hee Lee
(Sungkyunkwan University)
Jeong Oun Bae
(Sungkyunkwan University)
Kyong Nam Kim
(Sungkyunkwan University)
Geun Young Yeom
(Sungkyunkwan University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.LW1.172
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