Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session KW2: Magnetically Enhanced Plasmas
1:30 PM–3:30 PM,
Wednesday, October 14, 2015
Room: 308 AB
Chair: Tim Gans, York University
Abstract ID: BAPS.2015.GEC.KW2.7
Abstract: KW2.00007 : Coupling modes in a dipolar microwave plasma source
3:15 PM–3:30 PM
Preview Abstract Abstract
Authors:
Ana Lacoste
(LPSC, Universit\'e Grenoble Alpes, CNRS/IN2P3, 53 rue des Martyrs, 38026 Grenoble Cedex, France)
Pierre Baele
(LPSC, Universit\'e Grenoble Alpes, CNRS/IN2P3, 53 rue des Martyrs, 38026 Grenoble Cedex, France)
Remy Maurau
(LPSC, Universit\'e Grenoble Alpes, CNRS/IN2P3, 53 rue des Martyrs, 38026 Grenoble Cedex, France)
Stephane Bechu
(LPSC, Universit\'e Grenoble Alpes, CNRS/IN2P3, 53 rue des Martyrs, 38026 Grenoble Cedex, France)
Alexandre Bes
(LPSC, Universit\'e Grenoble Alpes, CNRS/IN2P3, 53 rue des Martyrs, 38026 Grenoble Cedex, France)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.KW2.7
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