Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session DT4: Basic Low Pressure Plasma Physics
8:00 AM–9:30 AM,
Tuesday, October 13, 2015
Room: 303 AB
Chair: Scott Baalrud, University of Iowa
Abstract ID: BAPS.2015.GEC.DT4.4
Abstract: DT4.00004 : Measuring IVDF through high-aspect holes in pulsed ICP plasma*
8:45 AM–9:00 AM
Preview Abstract Abstract
Authors:
Gilles Cunge
(LTM-CNRS)
Maxime Darnon
(LTM-CNRS)
Jerome Dubois
(LTM-CNRS)
Philippe Bezard
(LTM-CNRS)
Odile Mourey
(LTM-CNRS)
Camille Petit-Etienne
(LTM-CNRS)
Laurent Vallier
(LTM-CNRS)
Emilie Despiau-Pujo
(LTM-CNRS)
Olivier Joubert
(LTM-CNRS)
Nader Sadeghi
(LTM-CNRS)
*This project is funded by the French Agence Nationale de la Recherche in the frame of the project cleanGRAPH (ANR-13-BS09-0019)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.DT4.4
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