Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session TF2: Low Pressure Plasma Modeling II
10:30 AM–12:15 PM,
Friday, October 4, 2013
Room: Ballroom II
Chair: Mirko Vukovic, Tokyo Electron
Abstract ID: BAPS.2013.GEC.TF2.4
Abstract: TF2.00004 : Self-Consistent Simulations of the Radial Line Slot Antenna Plasma Source
11:45 AM–12:00 PM
Preview Abstract Abstract
Authors:
Peter Ventzek
(Tokyo Electron America)
Rochan Upadhyay
(Esgee Technologies Inc.)
Michitaka Aita
(Tokyo Electron Ltd.)
Jun Yoshikawa
(Tokyo Electron Ltd.)
Toshihiko Iwao
(Tokyo Electron Ltd.)
Kiyotaka Ishibashi
(Tokyo Electron Ltd.)
Laxminarayan Raja
(The University of Texas at Austin)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.TF2.4
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