Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session SF2: Plasma Deposition
8:30 AM–10:00 AM,
Friday, October 4, 2013
Room: Ballroom II
Chair: Hirotaka Toyoda, Nagoya University
Abstract ID: BAPS.2013.GEC.SF2.5
Abstract: SF2.00005 : Atmospheric inductively coupled Ar/H$_{2}$ plasmas jet for low-temperature deposition of Cu Thin Film on Polyimide
9:45 AM–10:00 AM
Preview Abstract Abstract
Authors:
Peng Zhao
(Shizuoka University)
Wei Zheng
(Research and Technology Center, Yazaki Corp.)
Yuedong Meng
(Institute of Plasma Physics, Chinese Academy of Sciences)
Masaaki Nagatsu
(Shizuoka University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.SF2.5
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