Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session SF2: Plasma Deposition
8:30 AM–10:00 AM,
Friday, October 4, 2013
Room: Ballroom II
Chair: Hirotaka Toyoda, Nagoya University
Abstract ID: BAPS.2013.GEC.SF2.3
Abstract: SF2.00003 : Diagnostics and Monitoring of a Plasma Beam Source based on Optical Emission Spectroscopy*
9:15 AM–9:30 AM
Preview Abstract Abstract
Authors:
Jens Harhausen
(Leibniz Institute for Plasma Science and Technology)
R\"udiger Foest
(Leibniz Institute for Plasma Science and Technology)
Detlef Loffhagen
(Leibniz Institute for Plasma Science and Technology)
Andreas Ohl
(Leibniz Institute for Plasma Science and Technology)
Jan Sch\"afer
(Leibniz Institute for Plasma Science and Technology)
*Funded by the German Ministry for Education and Research (BMBF, Fkz. 13N10462).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.SF2.3
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