Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session SF1: Plasmas for Nanotechnologies
8:30 AM–10:00 AM,
Friday, October 4, 2013
Room: Ballroom I
Chair: Tomohiro Nozaki, Tokyo Institute of Technology
Abstract ID: BAPS.2013.GEC.SF1.5
Abstract: SF1.00005 : Cluster control plasma CVD for fabrication of stable a-Si:H solar cells*
9:45 AM–10:00 AM
Preview Abstract Abstract
Authors:
Masaharu Shiratani
(Kyushu University)
Yuuji Hashimoto
(Kyushu University)
Yoshinori Kanemitsu
(Kyushu University)
Hyunwoong Seo
(Kyushu University)
Kunihiro Kamataki
(Kyushu University)
Giichiro Uchida
(Kyushu University)
Naho Itagaki
(Kyushu University)
Kazunori Koga
(Kyushu University)
*Work supported by NEDO, PVTEC, and MEXT.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.SF1.5
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