Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session PR3: Gas Phase Plasma Chemistry
1:30 PM–3:00 PM,
Thursday, October 3, 2013
Room: Nassau Room
Chair: Timo Gans, University of York
Abstract ID: BAPS.2013.GEC.PR3.2
Abstract: PR3.00002 : Homogeneous and Heterogeneous Reaction Mechanisms in CH$_{3}$F-O$_{2}$ Inductively Coupled Plasmas*
1:45 PM–2:00 PM
Preview Abstract Abstract
Authors:
Vincent M. Donnelly
(University of Houston)
Erdinc Karakas
(University of Houston)
Sanbir Kaler
(University of Houston)
Qiaowei Lou
(University of Houston)
Demetre J. Economou
(University of Houston)
*Work supported by Lam Research Corp.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.PR3.2
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