Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session NR2: Plasma-surface Interactions
10:00 AM–12:15 PM,
Thursday, October 3, 2013
Room: Ballroom II
Chair: Yevgeny Raitses, Princeton Plasma Physics Laboratory
Abstract ID: BAPS.2013.GEC.NR2.9
Abstract: NR2.00009 : Plasma-Surface Interactions and Feature Profile Simulations
12:00 PM–12:15 PM
Preview Abstract Abstract
Authors:
Paul Moroz
(Tokyo Electron US Holdings, Inc.)
Daniel Moroz
(University of Pennsylvania)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.NR2.9
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700