Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session HW1: Poster Session II (8:00-9:30AM)
8:00 AM,
Wednesday, October 2, 2013
Room: Ballroom Foyer
Abstract ID: BAPS.2013.GEC.HW1.87
Abstract: HW1.00087 : Development and characterization of a neutral beam source for sub-10 nm etching*
Preview Abstract Abstract
Authors:
Daniil Marinov
(Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK)
Ziad el Otell
(Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK)
Nicholas St. Braithwaite
(Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK)
Mark Bowden
(Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK)
*This work is part of the EU-FP7 project Single Nanometer Manufacturing
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.HW1.87
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