Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session HW1: Poster Session II (8:00-9:30AM)
8:00 AM,
Wednesday, October 2, 2013
Room: Ballroom Foyer
Abstract ID: BAPS.2013.GEC.HW1.77
Abstract: HW1.00077 : The effect of dust on the electron heating in capacitively coupled H$_2$/SiH$_4$ single- and dual-frequency discharges*
Preview Abstract Abstract
Authors:
Edmund Sch\"{u}ngel
(Institute for Plasma and Atomic Physics, Ruhr-University Bochum)
Sebastian Mohr
(Institute for Plasma and Atomic Physics, Ruhr-University Bochum)
Shinya Iwashita
(Institute for Plasma and Atomic Physics, Ruhr-University Bochum)
Julian Schulze
(Institute for Plasma and Atomic Physics, Ruhr-University Bochum)
Uwe Czarnetzki
(Institute for Plasma and Atomic Physics, Ruhr-University Bochum)
*Funded by the German Federal Ministry for the Environment (0325210B) and the Ruhr-University Research Department Plasma.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.HW1.77
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