Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session HW1: Poster Session II (8:00-9:30AM)
8:00 AM,
Wednesday, October 2, 2013
Room: Ballroom Foyer
Abstract ID: BAPS.2013.GEC.HW1.68
Abstract: HW1.00068 : Measurement of Ion Energy Distribution in Magnetized ICP using Multi-channel Ion Energy Analyzer*
Preview Abstract Abstract
Authors:
WooHyun Lee
(Department of Electrical and Computer Engineering, Seoul National University, South Korea)
Hyuk Kim
(Department of Electrical and Computer Engineering, Seoul National University, South Korea)
JiWon Kim
(Department of Electrical and Computer Engineering, Seoul National University, South Korea)
Hee Woon Cheong
(Department of Electrical and Computer Engineering, Seoul National University, South Korea)
Il Gyo Koo
(Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea)
Soojin Lee
(Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea)
Hyo-seong Seong
(Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea)
Ki-Woong Whang
(Department of Electrical and Computer Engineering, Seoul National University, South Korea)
*This was supported by SEMES cooperative research project.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.HW1.68
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700