Thursday, October 7, 2010
2:00PM - 2:30PM
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PR1.00001: 2D Hybrid Fluid-Analytical Model of Inductive/Capacitive Plasma Discharges
Invited Speaker:
Emi Kawamura
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Thursday, October 7, 2010
2:30PM - 2:45PM
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PR1.00002: Electrical and Plasma Parameters of ICP with High Coupling Efficiency
Valery Godyak
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Thursday, October 7, 2010
2:45PM - 3:00PM
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PR1.00003: Measurement of space and time resolved E-H and H-E transition in inductively coupled plasma in O$_{2}$/Ar
Yuichiro Hayashi
, Yo Mitsui
, Tetsuya Tatsumi
, Toshiaki Makabe
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Thursday, October 7, 2010
3:00PM - 3:15PM
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PR1.00004: The dynamics of charged particles close to the E-H mode transition in argon and oxygen inductively coupled radio-frequency plasmas
Mujahid Zaka ul Islam
, Timo Gans
, Deborah O'Connell
, Bill Graham
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Thursday, October 7, 2010
3:15PM - 3:30PM
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PR1.00005: Electrical Modeling of the Inductively Coupled Plasma Discharges
William Graham
, Robson Vieira
, Stanislav Moshkalev
, Sergey Balashov
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