Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session VF1: Capacitively-Coupled Plasmas
4:00 PM–6:00 PM,
Friday, October 8, 2010
Room: 151
Chair: Miles Turner, Dublin City University
Abstract ID: BAPS.2010.GEC.VF1.6
Abstract: VF1.00006 : Confinement effect due to standing wave in VHF driven CCP*
5:45 PM–6:00 PM
Preview Abstract Abstract
Authors:
Seok-Hwan Lee
(Seoul National University)
Myung-Sun Choi
(Seoul National University)
Gon-Ho Kim
(Seoul National University)
*IT R\&D program of MKE/KEIT [2009-F-018-01, TFT Backplane technology for next generation display].
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.VF1.6
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