Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session TF4: Plasma Diagnostics III: Reactive Plasmas
10:30 AM–12:30 PM,
Friday, October 8, 2010
Room: 151
Chair: Gilles Cunge, LTM-CNRS, Grenoble, France
Abstract ID: BAPS.2010.GEC.TF4.5
Abstract: TF4.00005 : Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl$_2$-H$_2$ ICP plasma
11:45 AM–12:00 PM
Preview Abstract Abstract
Authors:
Garrett Curley
(IEMN-CNRS, University of Lille 1, Lille, France / LPN-CNRS, Marcoussis, France)
Lina Gatilova
(LPN-CNRS, Marcoussis, France)
Stephane Guilet
(LPN-CNRS, Marcoussis, France)
Sophie Bouchoule
(LPN-CNRS, Marcoussis, France)
Gurusharan Gogna
(NCPST, Dublin City University, Dublin, Ireland)
Nishant Sirse
(NCPST, Dublin City University, Dublin, Ireland)
Shantanu Karkari
(NCPST, Dublin City University, Dublin, Ireland)
Jean-Paul Booth
(LPP, Ecole Polytechnique, Palaiseau, France)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.TF4.5
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