Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session PR1: Inductively-Coupled Plasmas |
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Chair: Gerjan Hagelaar, CNRS-Laplace Toulouse, France Room: 151 |
Thursday, October 7, 2010 2:00PM - 2:30PM |
PR1.00001: 2D Hybrid Fluid-Analytical Model of Inductive/Capacitive Plasma Discharges Invited Speaker: A fast 2D hybrid fluid-analytical TCP reactor model was developed using the finite elements simulation tool COMSOL. For a typical chlorine reactor, the simulation time was less than 90 minutes (less than 30 minutes for argon) on a moderate 2 GHz CPU workstation with 4GB of memory. Both inductive and capacitive coupling of the source coils to the plasma are included in this model. The model also includes a capacitive bias option for the wafer electrode. A bulk fluid plasma model, which solves the time-dependent plasma fluid equations for the ion continuity and electron energy balance, is coupled with an analytical sheath model. An actual vacuum sheath of variable thickness is modeled with a fixed-width sheath of variable dielectric constant. The sheath heating is treated as an incoming heat flux at the plasma-sheath boundary, and a dissipative term is added to the sheath dielectric constant. A gas flow model solves for the steady state pressure, temperature and velocity of the neutrals. By varying the model parameters (e.g., pressure, input power, source coil configuration, chamber height), we observe the effect on the plasma (e.g., uniformity, density, capacitive coupling). We are also working on a multi-frequency sheath model, and on coupling a particle code to the hybrid fluid-analytical model to obtain the ion energy and angular distributions at the substrate. [Preview Abstract] |
Thursday, October 7, 2010 2:30PM - 2:45PM |
PR1.00002: Electrical and Plasma Parameters of ICP with High Coupling Efficiency Valery Godyak A novel design of ICP with high coupling efficiency together with experimental study of its basic electrical and plasma parameters are given in this presentation. The efficiency augmentation is achieved by using a thin window and an antenna coil enhanced by a ferromagnetic core. Considerable improvement of ICP electrical and plasma characteristics is demonstrated through experiments in ICP operated at 2 MHz in a wide range of argon gas pressures between 1 mTorr and 1Torr, discharge power between 15 W and 0.5 KW and discharge gap between 1.5 and 8 cm. The measured power loss in the ferrite core antenna in this ICP was found to be essentially lower than that in traditional pancake ICPs. It is shown that contrary to prevailing lore, the ICP can stably operate at low plasma density and small gap. [Preview Abstract] |
Thursday, October 7, 2010 2:45PM - 3:00PM |
PR1.00003: Measurement of space and time resolved E-H and H-E transition in inductively coupled plasma in O$_{2}$/Ar Yuichiro Hayashi, Yo Mitsui, Tetsuya Tatsumi, Toshiaki Makabe Inductively coupled plasma (ICP) has been widely used in the industry. ICP in oxygen or in a form diluted by rare gases is applied for various oxidation processes. Plasma in a mixture of oxygen and rare gases has different nature from plasma in rare gases due to the presence of massive electronegative ions. It is well known that ICP has two operating modes (capacitive (E-) and inductive (H-) mode) and there is a transition between these modes depending on the external plasma condition. In this work we have measured the transient image of the E-to-H and H-to-E transition in an inductively coupled radio frequency plasma in mixtures of oxygen and argon by using intensified charge coupled device camera. It is observed that higher coil current is required to sustain the plasma in oxygen/argon mixture and the hysteresis loop is smaller than that in pure Ar. Due to the loss of electron by negative ion formation of oxygen molecules, the asymmetric profile of the 2D net excitation rate is more pronounced. [Preview Abstract] |
Thursday, October 7, 2010 3:00PM - 3:15PM |
PR1.00004: The dynamics of charged particles close to the E-H mode transition in argon and oxygen inductively coupled radio-frequency plasmas Mujahid Zaka ul Islam, Timo Gans, Deborah O'Connell, Bill Graham Inductively coupled radio-frequency plasmas can operate in different operation modes. At low input power and comparatively low plasma densities the plasma is sustained in capacitive mode (E-mode). As the power and hence plasma density increases a transition to inductive mode (H-mode) is observed. Argon and oxygen plasmas and their mixtures are investigated. Here we report on investigations into the power coupling close to the E-H mode transition. Electron, positive and negative ion density measurements (Langmuir probe {\&} photo-detachment) and space and phase resolved optical emission spectroscopy (PROES) are employed. The measurements reveal that this transition region is of particular interest and governed by a non-linear dynamics exhibiting complex mixtures of various power coupling mechanisms through capacitive and inductive electric fields. [Preview Abstract] |
Thursday, October 7, 2010 3:15PM - 3:30PM |
PR1.00005: Electrical Modeling of the Inductively Coupled Plasma Discharges William Graham, Robson Vieira, Stanislav Moshkalev, Sergey Balashov The classical electrical model of an ICP discharge is based on the transformer formalism. The primary side is the external coil and the secondary side is the plasma system inside the chamber. Some lumped elements are included in the model to simulate the internal impedances of an ICP discharge. In the steady state, the power absorbed by the resistors in model (PABS) is equal to the power dissipated (PDIS). The exact operation point is intersection of PDIS and PABS (evaluated for a given electron density). Note that this approach is not able to get the dynamics of the E- to H-mode transition. The temporal response could be reached using an approach developed in this work. Experimental results show that for discharges in Ar, the role of Ar metastables in the transition can be important. Then, additionally to the electrical model, the kinetic equations below should be considered. Next step is to link the kinetic balance equations with the electrical model. The main goal of the work is to evaluate the role of metastables on the transition characteristic times, that can be measured directly in the experiment. [Preview Abstract] |
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