Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session NR2: Plasma Surface Interactions II
10:30 AM–12:30 PM,
Thursday, October 7, 2010
Room: 162
Chair: Hirotaka Toyoda, Nagoya University
Abstract ID: BAPS.2010.GEC.NR2.4
Abstract: NR2.00004 : Mechanism of Si Oxidation in H$_{2}$/O$_{2}$/Ar Surface Wave Plasma
11:30 AM–11:45 AM
Preview Abstract Abstract
Authors:
Keigo Takeda
(Department of Electrical Engineering and Computer Science, Nagoya University)
Masaru Hori
(Department of Electrical Engineering and Computer Science, Nagoya University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.NR2.4
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