Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session MR1: Plasma Nanotechnologies and Flexible Electronics I |
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Chair: Uwe Kortshagen, University of Minnesota Room: 162 |
Thursday, October 7, 2010 8:30AM - 9:00AM |
MR1.00001: Bottom-up approaches to plasma synthesis of nanomaterials Invited Speaker: Large-scale, low-pressure plasmas play an essential role in the manufacturing of integrated circuits that are now ubiquitous in consumer electronics. In recent years, new challenges have arisen for these top-down approaches to materials processing. Future electronic devices will incorporate nanoscale materials such as nanoparticles, carbon nanotubes, and silicon nanowires that cannot be fabricated by current plasma technology because of limitations associated with photolithography. In addition, emerging applications in sensors, energy, and medicine require materials that must be prepared from the ``bottom-up.'' The aim of our research is to develop a new class of plasmas, termed microplasmas, for nanomaterials synthesis. Microscale plasmas or microplasmas are a special class of electrical discharges formed in geometries where at least one dimension is less than 1 mm. As a result of their unique scaling, microplasmas operate stably at atmospheric pressure and contain large concentrations of energetic electrons (1-10 eV). These properties are attractive for a range of nanomaterials applications. Vapor-phase metal-organic precursors can be dissociated near ambient conditions (i.e. room temperature and atmospheric pressure) to homogeneously nucleate metal [1] and alloyed [2] nanoparticles. Metal nanoparticles are then continuously injected into a flow furnace to catalyze the growth of chirally-enriched carbon nanotubes or diameter-controlled silicon nanowires [3]. Recently, we have also coupled microplasmas with liquids or polymeric films to nucleate nanoparticles from metal ions [4]. In this talk, I will discuss these topics in detail, highlighting the advantages of microplasma-based systems for the synthesis of well-defined nanomaterials.\\[4pt] [1] W-H. Chiang and R. M. Sankaran, Appl. Phys. Lett. 91, 121503 (2007)\\[0pt] [2] W-H. Chiang and R. M. Sankaran, Adv. Mater. 20, 4857 (2008)\\[0pt] [3] W-H. Chiang and R. M. Sankaran, Nat. Mater. 8, 882 (2009)\\[0pt] [4] C. Richmonds and R. M. Sankaran, Appl. Phys. Lett. 93, 131501 (2008) [Preview Abstract] |
Thursday, October 7, 2010 9:00AM - 9:15AM |
MR1.00002: Plasma Directed Assembly and Organization: Formation of polymeric nanodots and silicon nanopillars Athanasios Smyrnakis, Dimitrios Kontziampasis, Aggelos Zeniou, Angeliki Tserepi, Evangelos Gogolides Periodic, well-defined, features in the nano-scale (dots, pillars, pores etc) are essential in several science and technology fields (photonics, hard disk drives, catalysis, biology). Top-down nano-lithographic processes, as well as self-assembly processes (block copolymer, colloidal particles) are used for the fabrication of such features. Here, we demonstrate an assembly-organization method to both create the nanodot pattern on any non-specialty commercial polymer, and then transfer it to the subsequent silicon substrate [1,2]. First we perform a simple, fast, low ion-energy oxygen plasma etching step in a helicon plasma source. This creates polymer nanodots on the polymer film, due to simultaneous co-deposition of etch inhibitors from the reactor walls. Pattern transfer of the polymer nanodots on silicon has been subsequently performed by either SF6/O2 based high-density plasma at cryogenic temperatures, or a gas mixture of SF6, C4F8 and O2 at room temperature, leading to the fabrication of high aspect ratio silicon nanopillars. Possible applications are discussed. [1] E. Gogolides et al., Patent Appl. no.PCT/GR2009/000039, [2] N. Vourdas et al., Nanotechnology 21 (2010) 085302 [Preview Abstract] |
Thursday, October 7, 2010 9:15AM - 9:30AM |
MR1.00003: Synthesis of nanodiamonds and diamondoids by dielectric barrier discharges generated in supercritical xenon Sven Stauss, Hiroyuki Miyazoe, Tomoki Shizuno, Koya Saito, Takehiko Sasaki, Kazuo Terashima Nanodiamond and diamondoids were synthesized by dielectric barrier discharge plasmas (applied voltage $\sim 2 - 8\,\mathrm{kV_{p-p}}$, frequency $5 - 10\,\mathrm{kHz}$) generated in supercritical xenon close to the critical point ($T_{\mathrm crit} = 289.7\,\mathrm{K}$, $p_{\mathrm crit} = 5.84\,\mathrm{MPa}$), using adamantane as a precursor. The synthesized materials were characterized by micro-Raman spectroscopy, which permitted to confirm the presence of sp$^3$ hybridized bonds. Matrix assisted laser desorption ionization mass spectrometry and gas chromatography - mass spectrometry were used to identify the synthesized materials. The most frequent peaks were those that could be attributed to hexamantane (C$_{4n+6}$H$_{4n+12}$, $n = 6$), but also peaks that could be attributed to other higher order diamondoids consisting of $n = 2 - 15$ of fused adamantane cages. [Preview Abstract] |
Thursday, October 7, 2010 9:30AM - 9:45AM |
MR1.00004: Synthesis of Carbon-Nanotube Fine-Particles in a Glow-Discharge Plasma and Evaluation of Hydrogen Storage Properties Yasuaki Hayashi, Masayoshi Imano, Yumi Kinoshita, Yoshifumi Kimura, Yasuhiro Masaki Nano-carbons, especially single-walled carbon nanotubes (SWNTs), are promising for hydrogen-storage materials in fuel-cell electric vehicle, because it has a large surface area per unit weight. We have developed a new gas phase synthesis method applying an RF glow discharge plasma for the suspension of negatively charged fine particles containing catalytic metal and carbon nanotubes along with hot-filaments, and succeeded to synthesize carbon fine particles including SWNTs in gas-phase. The synthesis process was monitored by the variation of RF self-bias voltage. Hydrogen storage property of our synthesized carbon fine-particles was evaluated by thermal-desorption spectroscopy to show the desorption of physisorbed hydrogen molecules between 100 to 200 degrees in centigrade. The synthesized carbon fine particles showed much higher capacity of hydrogen storage than commercialized SWNTs, CoMoCAT. It is suggested that the higher capacity of hydrogen storage for the synthesized carbon fine particles results from their larger surface area by curved and defected structure, which was confirmed by transmission electron microscopy. [Preview Abstract] |
Thursday, October 7, 2010 9:45AM - 10:00AM |
MR1.00005: Growth of carbon nanowalls using inductively coupled plasma-enhanced chemical vapor deposition Mineo Hiramatsu, Yuki Nihashi, Tomohiro Horaguchi, Masaru Hori Carbon nanowalls (CNWs), two-dimensional carbon nanostructures, were synthesized by inductively coupled plasma chemical vapor deposition system employing methane and argon mixtures. CNWs with relatively smooth surface were fabricated at a high growth rate of approximately 50 nm/min. Furthermore, area-selective growth of CNWs were demonstrated using patterned Ti film on the Si substrate. CNW growth was enhanced on the Ti thin layer, compared with the CNWs grown on the Si surface. The height of the CNWs grown on the Ti film was 1.6 times greater than that on the Si surface. As an application of CNWs, field electron emission characteristics were investigated for the CNW films. The field electron emission characteristics of CNWs were improved as a result of N2 plasma treatment. [Preview Abstract] |
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