Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session LW4: Plasma Deposition II
4:00 PM–6:00 PM,
Wednesday, October 6, 2010
Room: Grand Amphitheatre
Chair: Nader Sadeghi, Universite Joseph Fourier, Grenoble
Abstract ID: BAPS.2010.GEC.LW4.8
Abstract: LW4.00008 : Effects of deposition time on the structural and properties of nano-scale grain size beta-tantalum thin films produced by a magnetron sputtering system
5:45 PM–6:00 PM
Preview Abstract Abstract
Authors:
Davoud Dorranian
(Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran)
Elmira Solati
(Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran)
Mohammadreza Hantehzadeh
(Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran)
Mahmood Ghoranneviss
(Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran)
Amirhossein Sari
(Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.LW4.8
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