Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session LW4: Plasma Deposition II
4:00 PM–6:00 PM,
Wednesday, October 6, 2010
Room: Grand Amphitheatre
Chair: Nader Sadeghi, Universite Joseph Fourier, Grenoble
Abstract ID: BAPS.2010.GEC.LW4.2
Abstract: LW4.00002 : New Phases of Boron Nitride Grown by Laser-Plasma Synchronous Chemical Vapor Deposition
4:15 PM–4:30 PM
Preview Abstract Abstract
Authors:
Shojiro Komatsu
(National Institute for Materials Science)
Kazuaki Kobayashi
(National Institute for Materials Science)
Takahiro Nagata
(National Institute for Materials Science)
Toyohiro Chikyo
(National Institute for Materials Science)
Collaboration:
NIMS
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.LW4.2
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