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Thursday, October 16, 2008 10:00AM - 10:30AM |
QR1.00001: Control of Fluorocarbon Plasmas for Next-Generation ULSI Devices Invited Speaker: Tetsuya Tatsumi Preview Abstract |
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Thursday, October 16, 2008 10:30AM - 11:00AM |
QR1.00002: New insights into fundamental ion-surface interactions Invited Speaker: Michael Gordon Preview Abstract |
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Thursday, October 16, 2008 11:00AM - 11:30AM |
QR1.00003: Electron Scattering from Fluorocarbons and Their Radicals Invited Speaker: Todd Maddern Preview Abstract |
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Thursday, October 16, 2008 11:30AM - 12:00PM |
QR1.00004: Molecular dynamics simulations of blanket and small feature etching in fluorocarbon- and fluorine-containing plasmas Invited Speaker: Joseph Vegh Preview Abstract |