Session QR1: Fluorocarbon Plasmas II

Chair: J-P Booth, LPTP Ecole Polytechnique, France, and MJ Brunger, Flinders University, SA, Australia
- Salon E


Thursday, October 16, 2008
10:00AM - 10:30AM

QR1.00001: Control of Fluorocarbon Plasmas for Next-Generation ULSI Devices
Invited Speaker: Tetsuya Tatsumi

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Thursday, October 16, 2008
10:30AM - 11:00AM

QR1.00002: New insights into fundamental ion-surface interactions
Invited Speaker: Michael Gordon

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Thursday, October 16, 2008
11:00AM - 11:30AM

QR1.00003: Electron Scattering from Fluorocarbons and Their Radicals
Invited Speaker: Todd Maddern

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Thursday, October 16, 2008
11:30AM - 12:00PM

QR1.00004: Molecular dynamics simulations of blanket and small feature etching in fluorocarbon- and fluorine-containing plasmas
Invited Speaker: Joseph Vegh

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Session QR2: Electron Impact Ionization of Atoms and Molecules

Chair: Klaus Bartschat, Drake University
- Salon A-D


Thursday, October 16, 2008
10:00AM - 10:30AM

QR2.00001: Out of plane ($e,2e$) experiments on helium autoionizing levels
Invited Speaker: N.L.S. Martin

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Thursday, October 16, 2008
10:30AM - 11:00AM

QR2.00002: Electron Impact Ionization of the Rare Gases
Invited Speaker: Birgit Lohmann

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Thursday, October 16, 2008
11:00AM - 11:15AM

QR2.00003: GEC Student Award for Excellence Finalist: Atomic and Molecular Signatures for charged particle ionization
Ola Al-Hagan , Don Madison , Christian Kaiser , Andrew Murray

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Thursday, October 16, 2008
11:15AM - 11:30AM

QR2.00004: Accuracy of the Gamow Factor for Approximating the PCI (Post Collision Interaction) in Electron-Impact Ionization of Atoms
D.H. Madison , H.P. Saha , B. Lohmann , M.A. Stevenson , L.R. Hargreaves

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Thursday, October 16, 2008
11:30AM - 11:45AM

QR2.00005: ABSTRACT WITHDRAWN


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Thursday, October 16, 2008
11:45AM - 12:00PM

QR2.00006: ABSTRACT WITHDRAWN


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Session QR3: High Pressure Glow Discharges

Chair: Masaru Hori, Nagoya University, Japan
- Addison Room


Thursday, October 16, 2008
10:00AM - 10:15AM

QR3.00001: Time resolved studies of an industrial scale APGD system processing polymer film
William Graham , Damian Della Croce , Lucas Schaper , Alan Hynes , Liam O'Neill

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Thursday, October 16, 2008
10:15AM - 10:30AM

QR3.00002: Imminent Glow Discharges in Air at Atmospheric Pressure Using Nanosecond Repetitively Pulsed Discharges
David Pai , Deanna Lacoste , Christophe Laux

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Thursday, October 16, 2008
10:30AM - 10:45AM

QR3.00003: ABSTRACT WITHDRAWN


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Thursday, October 16, 2008
10:45AM - 11:00AM

QR3.00004: Microwave Discharge in a Supersonic Flow of Simulated Martian Atmospheric Gas
D.J. Drake , S. Popovic , L. Vuskovic

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Thursday, October 16, 2008
11:00AM - 11:30AM

QR3.00005: Micro-Discharge Scaling and Development from Centimetres to Microns: DC and RF Breakdown and Discharge Characterization around the Paschen Minimum
Invited Speaker: Paul Maguire

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Thursday, October 16, 2008
11:30AM - 11:45AM

QR3.00006: Production of atomic oxygen in an atmospheric pressure arc in air and its implications for NO$_{2}$ generation
Matthew R. King , Christopher J. Oldham , Jenna R. Puckett , Jerome J. Cuomo

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Thursday, October 16, 2008
11:45AM - 12:00PM

QR3.00007: Multivariate analysis of an Industrial atmospheric pressure glow discharge
Victor Law , Barry Twomey , John Tynan , Niall O'Connor , Denis Dowling , Stephen Daniels

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