Session QR1: Fluorocarbon Plasmas II

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Chair: J-P Booth, LPTP Ecole Polytechnique, France, and MJ Brunger, Flinders University, SA, Australia
- Salon E

Thursday, October 16, 2008
10:00AM - 10:30AM

 QR1.00001: Control of Fluorocarbon Plasmas for Next-Generation ULSI Devices
Invited Speaker: Tetsuya Tatsumi

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Thursday, October 16, 2008
10:30AM - 11:00AM

 QR1.00002: New insights into fundamental ion-surface interactions
Invited Speaker: Michael Gordon

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Thursday, October 16, 2008
11:00AM - 11:30AM

 QR1.00003: Electron Scattering from Fluorocarbons and Their Radicals
Invited Speaker: Todd Maddern

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Thursday, October 16, 2008
11:30AM - 12:00PM

 QR1.00004: Molecular dynamics simulations of blanket and small feature etching in fluorocarbon- and fluorine-containing plasmas
Invited Speaker: Joseph Vegh

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