Friday, October 17, 2008
1:30PM - 2:00PM
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XF2.00001: Nonlinear Effects on Heating in Capacitive Discharges
Invited Speaker:
Thomas Mussenbrock
Preview Abstract |
Friday, October 17, 2008
2:00PM - 2:15PM
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XF2.00002: The RF Sheath, Nonlinearity and Stochastic heating: An extended analytical approach
Michael Klick
Preview Abstract |
Friday, October 17, 2008
2:15PM - 2:30PM
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XF2.00003: Effects of Magnetic Field on Very High Frequency Capacitively Coupled Plasma
Kallol Bera
, Shahid Rauf
, Ken Collins
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Friday, October 17, 2008
2:30PM - 2:45PM
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XF2.00004: Resonance heating of dual frequency capacitive discharges
Dennis Ziegler
, Thomas Mussenbrock
, Ralf Peter Brinkmann
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Friday, October 17, 2008
2:45PM - 3:00PM
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XF2.00005: Electrode Impedance Effect on Electron Density in a CCP Reactor
Yohei Yamazawa
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Friday, October 17, 2008
3:00PM - 3:15PM
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XF2.00006: Characteristics of Pulsed Capacitively Coupled Plasma Sources for Plasma Etching
Ankur Agarwal
, Phillip Stout
, Shahid Rauf
, Ken Collins
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Friday, October 17, 2008
3:15PM - 3:30PM
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XF2.00007: A Parallelized 3D Particle-In-Cell Method With Magnetostatic Field Solver And Its Applications
Kuo-Hsien Hsu
, Yen-Sen Chen
, Men-Zan Bill Wu
, Jong-Shinn Wu
Preview Abstract |