Thursday, October 16, 2008
4:00PM - 4:15PM
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SR1.00001: 3-Dimensional Modeling of Capacitively-Coupled Plasmas with Asymmetric Reactor Elements
Jason Kenney
, Shahid Rauf
, Ken Collins
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Thursday, October 16, 2008
4:15PM - 4:30PM
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SR1.00002: Comparison between fluid simulations and experiments in inductively-coupled Ar/Cl$_{2}$ plasmas
Emilie Despiau-Pujo
, Cormac S. Corr
, Pascal Chabert
, William G. Graham
, Fernando G. Marro
, David B. Graves
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Thursday, October 16, 2008
4:30PM - 4:45PM
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SR1.00003: Electron series resonance in an inductive ion etching reactor
Hyo-Chang Lee
, Jin-Young Bang
, Chin-Wook Chung
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Thursday, October 16, 2008
4:45PM - 5:00PM
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SR1.00004: Electron and Ion Energy Distributions in Dual Frequency Capacitively Coupled Plasmas Considering Wave Effects
Yang Yang
, Mark J. Kushner
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Thursday, October 16, 2008
5:00PM - 5:15PM
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SR1.00005: Separate control of ion flux and energy in capacitively coupled RF discharges via the Electrical Asymmetry Effect
Julian Schulze
, Zoltan Donko
, Brian Heil
, Uwe Czarnetzki
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Thursday, October 16, 2008
5:15PM - 5:30PM
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SR1.00006: The 2nd Harmonic ECR Microplasma in Narrow Closed Space for Low Pressure Conditions
Hiroshi Fujiyama
, Akihiro Yukishige
, Ke Yan
, Masanori Shinohara
, Tatsuyuki Nakatani
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