Thursday, October 16, 2008
1:30PM - 1:45PM
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RR1.00001: Plasma Characterization of MPCVD Discharges for Nanocrystalline Diamond Deposition
Leigh Winfrey
, Steven Shannon
, Richard Chromik
, Kathryn Wahl
, Robert Nemanich
, Mohamed Bourham
Preview Abstract |
Thursday, October 16, 2008
1:45PM - 2:00PM
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RR1.00002: Nano-particle manipulation using pulse RF discharges with amplitude modulation
Shinya Iwashita
, Hiroshi Miyata
, Hidefumi Matsuzaki
, Kazunori Koga
, Masaharu Shiratani
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Thursday, October 16, 2008
2:00PM - 2:15PM
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RR1.00003: GEC Student Award for Excellence Finalist: Plasma controlled adatom delivery and (re)distribution: enabling uninterrupted low temperature growth of ultra long vertically aligned carbon nanotubes
Eugene Tam
, Kostya Ostrikov
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Thursday, October 16, 2008
2:15PM - 2:30PM
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RR1.00004: Thermal treatment influence on magnetoresistive properties of the MgF$_2$ - Co and and MgF$_2$ - Permalloy films prepared by thermoelectron sustained vacuum discharge
C.P. Lungu
, I. Mustata
, A. Anghel
, A.M. Lungu
, O. Pompilian
, C. Porosnicu
, C. Ticos
, V. Kuncser
, G. Schinteie
, D. Predoi
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Thursday, October 16, 2008
2:30PM - 2:45PM
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RR1.00005: High Aspect Ratio HBr Based Dry Etching of GaInAsP/InP for Nanoscale Photonic Couplers
Nahid Sultana
, Wei Zhou
, Duncan MacFarlane
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Thursday, October 16, 2008
2:45PM - 3:00PM
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RR1.00006: Control of deposition profile of plasma CVD hard carbon films on substrates with trenches
Masaharu Shiratani
, Jun Umetsu
, Kazuhiko Inoue
, Takuya Nomura
, Hidefumi Matsuzaki
, Kazunori Koga
, Yuichi Setsuhara
, Makoto Sekine
, Masaru Hori
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Thursday, October 16, 2008
3:00PM - 3:15PM
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RR1.00007: Plasma assisted deposition of metal fluorides for 193nm applications
Martin Bischoff
, Maik Sode
, Dieter Gaebler
, Norbert Kaiser
, Andreas Tuennermann
Preview Abstract |