Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session XF1: Material Processing II
1:30 PM–3:30 PM,
Friday, October 17, 2008
Room: Salon E
Chair: S.G. Walton, Naval Research Laboratory
Abstract ID: BAPS.2008.GEC.XF1.6
Abstract: XF1.00006 : Control Capabilities of Low-Inductance-Antenna-Driven RF Plasmas for Low-Damage Processing of Polymers*
2:45 PM–3:00 PM
Preview Abstract Abstract
Authors:
Yuichi Setsuhara
(Osaka Univ., JST, CREST)
Kosuke Takenaka
(Osaka Univ.)
Ken Cho
(Osaka Univ.)
Akinori Ebe
(EMD Corp.)
Masaharu Shiratani
(Kyushu Univ., JST, CREST)
Makoto Sekine
(Nagoya Univ., JST, CREST)
Masaru Hori
(Nagoya Univ., JST, CREST)
*JST, CREST, Global COE program (Material, Osaka Univ.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.XF1.6
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