Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session LW1: Plasma Diagnostics I
1:30 PM–3:30 PM,
Wednesday, October 15, 2008
Room: Salon E
Chair: Noah Hershkowitz, University of Wisconsin-Madison
Abstract ID: BAPS.2008.GEC.LW1.8
Abstract: LW1.00008 : Integrated Plasma-Surface Kinetics Model to Predict Deposition Rates in an HDP-CVD Reactor
3:15 PM–3:30 PM
Preview Abstract Abstract
Authors:
Ananth Bhoj
(Novellus Systems, Inc.)
Prashanth Kothnur
(Novellus Systems, Inc.)
Ron Kinder
(Novellus Systems, Inc.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.LW1.8
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