Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session ET1: Dielectric Barrier Discharges and Displays
4:00 PM–5:30 PM,
Tuesday, October 14, 2008
Room: Salon E
Chair: O. Sakai, Kyoto University, Japan
Abstract ID: BAPS.2008.GEC.ET1.4
Abstract: ET1.00004 : Pulsed plasma-enhanced chemical vapor deposition (P-PECVD) of silicon based materials with a low-frequency dielectric barrier discharge (DBD)*
4:45 PM–5:00 PM
Preview Abstract Abstract
Authors:
Christopher J. Oldham
(Department of Materials Science and Engineering, NC State University)
Matthew R. King
(Department of Materials Science and Engineering, NC State University)
C. Richard Guarnieri
(Department of Materials Science and Engineering, NC State University)
Jerome J. Cuomo
(Department of Materials Science and Engineering, NC State University)
*This work was funded by the Dean's office in the College of Engineering and the Department of Materials Science and Engineering
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.ET1.4
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