Session FTP1: Poster Session I (19:00-21:30)
7:00 PM–7:00 PM, Tuesday, October 14, 2008
Room: Salon F-J
Chair: I. Langmuir
Abstract ID: BAPS.2008.GEC.FTP1.62
Abstract: FTP1.00062 : Interconnected Microcavity Plasma Arrays: New Opportunity For Microplasma Chemical Reactors
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Abstract 
Authors:
Sung-Jin Park
(University of Illinois at Urbana-Champaign)
Tyler Anderson
(University of Illinois at Urbana-Champaign)
Jeffrey Ma
(University of Illinois at Urbana-Champaign)
Jie Zheng
(University of Illinois at Urbana-Champaign)
Cherk Lam
(University of Illinois at Urbana-Champaign)
J. Gary Eden
(University of Illinois at Urbana-Champaign)
Various microchemical reactors consisting of parallel, linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 $\times $ 10 arrays of 400 $\mu $m dia. devices with 125 $\mu $m wide gas flow channels have been conducted in rare gas and Ar/CS$_{2}$ flows and excitation of the array with a sinusoidal voltage. Visible chemiluminescence ($\lambda \sim $505 nm) resulting from the A $\to $ X transition of CS$_{2}^{+}$ and the deposition of a (C -- S)$_{n}$ microstructured polymer have been observed in the Ar/CS$_{2}$ flow experiments. Microplasma properties in a restricted gas flow and the potential of these arrays for microchemical applications will be discussed.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.FTP1.62