Session FTP1: Poster Session I (19:00-21:30)
7:00 PM–7:00 PM, Tuesday, October 14, 2008
Room: Salon F-J
Chair: I. Langmuir
Abstract ID: BAPS.2008.GEC.FTP1.39
Abstract: FTP1.00039 : Frequency Effect on RF Gas Breakdown
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Abstract 
Authors:
Valeriy Lisovskiy
(Kharkov National University, 4 Svobody sq., Kharkov, 61077, Ukraine)
Vladimir Yegorenkov
(Kharkov National University)
Jacques Jolly
(Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau 91128, France)
Jean-Paul Booth
(Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique)
We registered rf breakdown curves of the parallel-plate capacitive discharge in the range of frequency values from 13.56 MHz to 105 MHz with the inter-electrode gap of 3 cm and in the hydrogen pressure range of values from 0.001 to 1 Torr. Rf breakdown curves for the frequencies up to 40 MHz possess the diffusion-drift branch with a multi-valued section, then with lowering the pressure the Paschen and multipactor branches are observed. For higher frequency values the diffusion drift branch assumes a U-shaped form, it does not possess a multi-valued section and transforms directly to the multipactor branch. On increasing the frequency the rf breakdown voltage of the multipactor branch grows linearly, and the minimum of the diffusion-drift branch is shifted to the range of higher gas pressure and rf voltage values.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.FTP1.39