### Session FTP1: Poster Session I (19:00-21:30)

7:00 PM–7:00 PM, Tuesday, October 14, 2008
Room: Salon F-J

Chair: I. Langmuir

Abstract ID: BAPS.2008.GEC.FTP1.75

### Abstract: FTP1.00075 : Experimental measurements of the total energy loss in low pressure inductively coupled argon plasma

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#### Authors:

Young-Kwang Lee
(Hanyang University)

Min-Hyong Lee
(Hanyang University)

Chin-Wook Chung
(Hanyang University)

Total energy lost per electron-ion pair lost ($\varepsilon _{T})$ was measured experimentally in a low pressure inductively coupled argon plasma. $\varepsilon _{T}$ represents not only the elastic and inelastic collision energy loss of electron-neutral but also the kinetic energy loss when the electron and ion escape to the wall. In order to determine $\varepsilon _{T}$, the modified power balance of a global model (spatially-averaged) is properly derived using some assumptions. A floating-type probe working at very low bias voltage ($\sim$1.0 V) was applied to obtain the electron temperature and plasma density at the plasma-sheath boundary. At 10 mTorr, the measurement shows that the measured $\varepsilon _{T} \sim$100 V gradually decreased with absorbed power and began to saturate. These $\varepsilon _{T}$ are consistent with the theoretical results by Lee \textit{et al} [1]. [1] Min-Hyong Lee, Sung-Ho Jang and Chin-Wook Chung, Phys. Plasmas, 13, 053502 (2006)

To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.FTP1.75