Session FTP1: Poster Session I (19:00-21:30)
7:00 PM–7:00 PM, Tuesday, October 14, 2008
Room: Salon F-J
Chair: I. Langmuir
Abstract ID: BAPS.2008.GEC.FTP1.7
Abstract: FTP1.00007 : Real-time measurement of electron temperatures and ion densities using self-bias effect in argon inductively coupled plasma
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Abstract 
Authors:
Kwang-Tae Hwang
(Department of Electrical Engineering, Hanyang University, Republic of Korea)
Ik-Jin Choi
(Department of Electrical Engineering, Hanyang University, Republic of Korea)
Chin-Wook Chung
(Department of Electrical Engineering, Hanyang University, Republic of Korea)
AC bias voltage was applied through a DC blocking capacitor between a probe and a signal generator. Self-bias potentials were changed with the amplitude of AC bias voltage, electron temperatures and ion densities. The electron temperature and ion density were measured from the variations of the self-bias potentials at various RF powers (100-500W) and pressures (5-50mTorr). The experimental results were in good agreement with those from Langmuir probes.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.FTP1.7