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60th Gaseous Electronics Conference

Tuesday–Friday, October 2–5, 2007; Arlington, Virginia

Session VF1: Materials Processing in Low Pressure Plasmas II: Etching, deposition, new materials

Chair: Evgeniya Lock, Naval Research Laboratory
Doubletree Crystal City - Crystal Ballroom A

Friday, October 5, 2007 8:00AM - 8:30AM	VF1.00001: Reaction of Fluorocarbon Species with Si and SiO$_{2}$ Surfaces Invited Speaker: Hirotaka Toyoda Preview Abstract
Friday, October 5, 2007 8:30AM - 8:45AM	VF1.00002: Modeling high aspect ratio contact etch of SiO$_{2}$ Phillip Stout Preview Abstract
Friday, October 5, 2007 8:45AM - 9:00AM	VF1.00003: Time dependence analysis of the 3D profile charging during $SiO_2$ etching in $Ar^{+}$/$CF_4$ plasma Branislav Radjenovic , Marija Radmilovic-Radjenovic , Zoran Petrovic Preview Abstract
Friday, October 5, 2007 9:00AM - 9:15AM	VF1.00004: Plasma Modeling for Cu barrier/seed applications Prashanth Kothnur , Ananth Bhoj , Ron Kinder Preview Abstract
Friday, October 5, 2007 9:15AM - 9:30AM	VF1.00005: Spatial distributions of Cu particulates in high-pressure magnetron sputtering plasmas studied by laser light scattering N. Nafarizal , N. Takada , K. Sasaki , M. Ikeda , Y. Sago Preview Abstract
Friday, October 5, 2007 9:30AM - 9:45AM	VF1.00006: Multi-hollow discharge plasma CVD reactor with magnets for highly stable a-Si:H film deposition Kazunori Koga , William M. Nakamura , Hiroshi Satou , Hiroomi Miyahara , Masaharu Shiratani Preview Abstract
Friday, October 5, 2007 9:45AM - 10:00AM	VF1.00007: Control of structures of Carbon Nanowalls in plasma enhanced CVD Wakana Takeuchi , Yutaka Tokuda , Mineo Hiramatsu , Hiroyuki Kano , Masaru Hori Preview Abstract

Session VF2: Plasma Diagnostics I

Chair: Alex Paterson, Applied Materials
Doubletree Crystal City - Crystal Ballroom B

Friday, October 5, 2007 8:00AM - 8:30AM	VF2.00001: Reflections on Electric Probes Invited Speaker: Nicholas Braithwaite Preview Abstract
Friday, October 5, 2007 8:30AM - 8:45AM	VF2.00002: Xenon operation of the Non-ambipolar Electron Source Noah Hershkowitz , Ben Longmier Preview Abstract
Friday, October 5, 2007 8:45AM - 9:00AM	VF2.00003: Nanoparticle charging in weakly ionized gases Marco Francesco Gatti , Uwe Kortshagen Preview Abstract
Friday, October 5, 2007 9:00AM - 9:15AM	VF2.00004: Electric probes for characterization of microwave produced plasma. Vipin K. Yadav Preview Abstract
Friday, October 5, 2007 9:15AM - 9:30AM	VF2.00005: The Bohm Criterion Revisited Natalia Sternberg , Valery Godyak Preview Abstract
Friday, October 5, 2007 9:30AM - 9:45AM	VF2.00006: First experimental test of the generalized Bohm criterion using Ar$^{+}$ and Xe$^{+}$ LIF in Ar-Xe plasmas Dongsoo Lee , Noah Hershkowitz , Greg Severn Preview Abstract
Friday, October 5, 2007 9:45AM - 10:00AM	VF2.00007: Numerical Solutions for Langmuir Probes Richard Fernsler Preview Abstract