Session QR1: Plasma Sources

Chair: Yohei Yamazawa, Tokyo Electron
Doubletree Crystal City - Crystal Ballroom A


Thursday, October 4, 2007
10:00AM - 10:15AM

QR1.00001: Two-dimensional Collisionless Weakly-ionized Plasma in Fluid Approximation
Valery Godyak , Natalia Sternberg

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Thursday, October 4, 2007
10:15AM - 10:30AM

QR1.00002: Capacitive Discharges Driven by Combined DC/RF Sources
M.A. Lieberman , Emi Kawamura , A.J. Lichtenberg , E.A. Hudson

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Thursday, October 4, 2007
10:30AM - 10:45AM

QR1.00003: RF discharge under the influence of a magnetic field
Ed Barnat , Paul Miller , Alex Paterson

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Thursday, October 4, 2007
10:45AM - 11:00AM

QR1.00004: The effect of radio-frequency bias on electron density in an inductively coupled plasma reactor, measured by a wave cutoff probe
Mark Sobolewski , Jung-Hyung Kim

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Thursday, October 4, 2007
11:00AM - 11:15AM

QR1.00005: Seasoning of Plasma Reactors: Feedback Control Strategies to Counter Wafer-to-Wafer Drifts
Ankur Agarwal , Mark J. Kushner

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Thursday, October 4, 2007
11:15AM - 11:30AM

QR1.00006: Diagnostics of continuous electron beam-generated plasma for material processing
Evgeniya Lock , Scott Walton , Richard Fernsler

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Thursday, October 4, 2007
11:30AM - 11:45AM

QR1.00007: Student Excellence Award Finalist: Double layers at anode spots in low-pressure plasma
Scott Baalrud , Noah Hershkowitz

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Thursday, October 4, 2007
11:45AM - 12:00PM

QR1.00008: Study of discharge characteristics on transition from metallic to reactive mode in radio frequency magnetron plasma
Joyanti Chutia , Hemen Kakati , Arup Ratan Pal , Heremba Bailung

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Session QR2: Electron-Atom Collisions

Chair: Michael Brunger, Flinders University
Doubletree Crystal City - Crystal Ballroom B


Thursday, October 4, 2007
10:00AM - 10:30AM

QR2.00001: Studies of Electron-Impact Induced Ionization of Atoms and Molecules Using Multi-Particle Imaging Techniques
Invited Speaker: Alexander Dorn

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Thursday, October 4, 2007
10:30AM - 10:45AM

QR2.00002: Positron scattering from helium
Casten Makochekanwa , Adric Jones , Peter Caradonna , Stephen Buckman , James Sullivan

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Thursday, October 4, 2007
10:45AM - 11:00AM

QR2.00003: Inner-shell photodetachment of Na$^-$ and electron-impact ionization of auto-ionizing states in Na.
Oleg Zatsarinny , Klaus Bartschat , A.A. Borovik

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Thursday, October 4, 2007
11:00AM - 11:15AM

QR2.00004: Projectile Interactions in Simultaneous Excitation-Ionization of Helium
A.L. Harris , M. Foster , J.L. Peacher , D.H. Madison

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Thursday, October 4, 2007
11:15AM - 11:30AM

QR2.00005: Charged-particle impact of quasi-two electron atoms
Klaus Bartschat , Xiaoxu Guan , Daniel Weflen

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Thursday, October 4, 2007
11:30AM - 12:00PM

QR2.00006: Recent Progress in Calculations of Electron-Impact Excitation of Rare Gases and its Impact on Gaseous Electronic Applications
Invited Speaker: Arati Dasgupta

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