Tuesday, October 2, 2007
4:00PM - 4:15PM
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ET1.00001: Student Excellence Award Finalist: Surface recombination study in near real time in Cl$_{2}$ plasmas
Joydeep Guha
, Vincent M. Donnelly
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Tuesday, October 2, 2007
4:15PM - 4:30PM
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ET1.00002: Analysis of plasma-surface interactions during plasma etching by in-situ diagnostics of reactants and reaction products
Yoshinori Ueda
, Masahiro Yoshida
, Koji Eriguchi
, Kouichi Ono
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Tuesday, October 2, 2007
4:30PM - 4:45PM
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ET1.00003: Experimental study and modeling of plasma-polymer interactions
Anatoly Napartovich
, Yuri Akishev
, Mikhail Grushin
, Nikolay Dyatko
, Igor Kochetov
, Nikolay Trushkin
, Tran Duc
, Francoise Sommer
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Tuesday, October 2, 2007
4:45PM - 5:00PM
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ET1.00004: Hydrogen plasma interaction with graphite surface
Gilles Cartry
, Cedric Thomas
, Jean-Marc Layet
, Thierry Angot
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Tuesday, October 2, 2007
5:00PM - 5:30PM
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ET1.00005: Plasma-Surface Interactions With Advanced Polymers For Nanoscale Patterning Of Materials
Invited Speaker:
Gottlieb Oehrlein
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Tuesday, October 2, 2007
5:30PM - 5:45PM
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ET1.00006: Comparison of gas-phase chemistry during deposition of amorphous carbon films using capacitive and inductive discharges.
S. Ramachandran
, L. Overzet
, W. Hu
, L.S.N. Tao
, G.-S. Lee
, C. Nelson
, M. Goeckner
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Tuesday, October 2, 2007
4:00PM - 4:30PM
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ET2.00001: Plasma-Based Low Energy Ion Implantation
Invited Speaker:
Ludovic Godet
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Tuesday, October 2, 2007
4:30PM - 4:45PM
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ET2.00002: Theory and particle-in-cell simulation of ion-ion plasmas
Gary Leray
, Albert Meige
, Jean-Luc Raimbault
, Pascal Chabert
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Tuesday, October 2, 2007
4:45PM - 5:00PM
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ET2.00003: Propagating double layers in electronegative plasmas
Albert Meige
, Nicolas Plihon
, Gerjan Hagelaar
, Jean-Pierre Boeuf
, Pascal Chabert
, Rod Boswell
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Tuesday, October 2, 2007
5:00PM - 5:15PM
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ET2.00004: Very High Frequency Capacitively Coupled Plasmas of Electronegative Gases
Shahid Rauf
, Kallol Bera
, Alex Paterson
, Ken Collins
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Tuesday, October 2, 2007
5:15PM - 5:30PM
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ET2.00005: Fast silicon etching by plasma-sheath-lens focused negative ions
Eugen Stamate
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Tuesday, October 2, 2007
5:30PM - 5:45PM
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ET2.00006: Plasma Characterization of Electronegatively diluted VHF CCP Plasmas
Alex Paterson
, Ned Hammond
, Shahid Rauf
, Ed Barnat
, Paul Miller
, Greg Hebner
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Tuesday, October 2, 2007
5:45PM - 6:00PM
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ET2.00007: Formation of ion flux in low frequency and low pressure ccrf discharge
I.V. Schweigert
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